For oil-sealed mechanical pumps for semiconductor processes where pumped gases react rapidly with conventional pump oils. Halocarbon oils are the primary lubricants in processes using pure oxygen and other strong oxidizing agents.
- Mechanical pumps may require heaters for starting.
- Pumps operated with conventional oils must be thoroughly cleaned before using Halocarbon.
Viscosity: Approx. 580 SSU @ 100° F.
Vapor Pressure: 0.007 Torr @ 73° C. |